sputter-ion pump

sputter-ion pump

[′spəd·ər ¦ī‚än ‚pəmp]
(engineering)
McGraw-Hill Dictionary of Scientific & Technical Terms, 6E, Copyright © 2003 by The McGraw-Hill Companies, Inc.
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Another option is to provide an additional pump, such as a small appendage sputter-ion pump, that can handle the small argon gas load.
This puts getter pumps within the category of capture pumps, along with cryopumps and sputter-ion pumps. Capture pumps can be taken as an analog of a garbage can.
The NEG pump, coupled to a distributed sputter-ion pump (SIP) - mostly intended to pump residual argon and possibly methane - constitutes the principal pumping system for the UHV regime, allowing routine operation in the low 10-11 torr range.
Vacuum pump types can be divided into two main groups; momentum transfer pumps, such as turbomolecular, molecular drag, and diffusion pumps, and capture pumps such as cryopumps, sputter-ion pumps, and getter pumps.
Sputter-ion pumps and titanium sublimation pumps use getter materials in their operation.