surface micromachining


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surface micromachining

[¦sər·fəs ‚mī·krə·mə′shēn·iŋ]
(engineering)
A set of processes based upon deposition, patterning, and selective etching of thin films to form a free-standing microsensor on the surface of a silicon wafer.
References in periodicals archive ?
Surface micromachining has been viewed as more cost-effective whereas bulk micromachining was often chosen for higher sensitivity and precision.
The uncertainty and scatter of the cell gap height is more specific for the surface micromachining approach, especially if in-cavity deposition is used [2].
This capacitor can be easily built using surface micromachining in CPW center microstrip conductor by having two plates facing each other separated by an air-gap.
The mechanical surface micromachining technique presented here will be capable of machining a wider range of materials which can benefit from superhydrophobicity.
If material is removed from the substrate, the process is called bulk micromachining (BMM), and if deposited layers are removed, the process is called surface micromachining (SMM).
In surface micromachining, detectors are fabricated on a silicon nitride membrane "table" supported by legs on top of a solid substrate.
The current experimental setup contains a 3 mm by 3 mm array of 1,024 (32 x32) cantilevers, which are created by silicon surface micromachining.
Surface micromachining technology has made many significant advances recently, but release and in-use stiction remain a key problem.
Accordingly, there are three main approaches, namely bulk micromachining, surface micromachining and LIGA.
is betting on a thermally actuated design fabricated by a complex combination of three MEMS processes: bulk micromachining, surface micromachining, and LIGA.
There are three primary categories of micromachining: bulk micromachining, surface micromachining and micromolding.
Figure 7 shows a rotor fabricated by surface micromachining.

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