Uniformity

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uniformity

[‚yü·nə′fȯr·məd·ē]
(mathematics)
A family of subsets of the direct product of a topological space with itself that is used to derive a uniform topology for the space. Also known as uniform structure.

Uniformity

The state of being identical, homogeneous, or regular.
References in periodicals archive ?
Designed to meet the full range of RTP process challenges for devices featuring sub-half-micron design rules, the Heatpulse 8108 utilizes AG Associates' patented cross lamp oven and individual zone control to generate exceptional temperature uniformities.
The TCP 9600SE system's plasma source has also been enhanced with new chamber ceramics and a larger TCP coil, resulting in more uniform ion density distribution in the plasma and improved oxide and photoresist etch rate uniformities.