x-ray lithography


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x-ray lithography

[′eks ‚rā li′thäg·rə·fē]
(electronics)
Lithography in which the resist is exposed to a well-collimated, high-intensity x-ray beam projected through a special mask in close proximity to the silicon slice.
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Watson Research Center in Yorktown Heights, N.Y., demonstrated that X-ray lithography can be used to build many devices side by side.
This novel method may in certain cases represent an inexpensive, efficient, "bench-top" alternative to the use of electron beams or such techniques as X-ray lithography for etching arrays of holes on graphite, silicon, and other surfaces, says Kenneth Douglas of the University of Colorado at Boulder.
semi-conductor industry in developing X-ray lithography for the production of computer chips.
Eighteen papers from the November 2004 conference explore the tribological design of grinding wheels using X-ray diffraction techniques, very deep X-ray lithography for heat and mass transfer applications, and X-ray micromachining with synchrotron radiation.
Earth-bound applications include x-ray lithography and environmental monitoring.
In LIGA, x-ray lithography is used to make patterns that are electroplated to quickly deposit thick layers.
The development team may even include several national labs, as is the case with the new soft x-ray lithography system being developed jointly by LLNL and Sandia National Laboratories, Livermore, CA, with support from Los Alamos (NM) National Laboratory and Lawrence Berkeley (CA) Laboratory (LBL).
"At the core of these developments are the methods of lithographic pattern definition which include photo, e-beam, ion-beam, and x-ray lithography," says Karl Hess, a researcher at the Beckman Institute for Advanced Science and Technology, Univ.