Terrestrial Radiation Effects in
ULSI Devices and Electronic Systems
This volume presents the proceedings of the March 2005 International Conference on Characerization and Metrology for
ULSI [ultra large scale integrated] Technology, the fifth in a series of conferences devoted solely to silicon semiconductor characterization and metrology.
Characterization and Metrology for
ULSI Technology: 2000, containing the proceedings for the June 2000 International Conference on Characterization and Metrology for
ULSI Technology, was published in February 2001.
The increasing need for improved quality products and the ease of fabricating pure wafers for ultra-large-scale integration (
ULSI) processes have hiked the demand for sophisticated semiconductor wafer cleaning technologies and equipment.
on Characterization and Metrology of
ULSI Tech., May 23-27, 1998, Gaithersburg, MD, pp.